Paul Planken
Paul Planken - Paul Planken, ARCNL group leader and professor at the Institute of Physics at the University of Amsterdam has been granted a project within the program High Tech Systems and Materials (HTSM) of NWO. Planken will collaborate with Dries van Oosten of the Debye Institute for NanoMaterials Science (Utrecht University) and the companies ASML and ALSI. Planken's project is aimed at understanding and preventing light-induced material changes in optical measurement systems. Wafer damage control. In the semiconductor industry, advanced optical sensors are used throughout the lithographic process. They play a vital role in nanolithography and help to keep Moore's law going. These sensors use more and more powerful light sources to increase signal strength, increasing the risk of optical damage.
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