KIC grant awarded to improve imaging of semiconductor chips

The Dutch Research Council (NWO) has awarded a grant to research on more efficient production of even smaller computer chips in the KIC call 'Demand-driven Partnerships for Consortia'. Researchers from Delft University of Technology and ARCNL are collaborating with ASML in order to inspect computer chips more precisely and faster with help of electrons. The Knowledge and Innovation Covenant (KIC) research programme stands for pioneering innovative solutions with social and economic impact. NWO funds the research with almost 2 million euros, ASML contributes with over 2.3 million co-funding. Chips are an indispensable element of any electronical system. They are composed of many tiny semiconductor components that are used in a variety of technologies, including computers and smartphones. Powerful semiconductors will have a vast influence on artificial intelligence, advanced networks (5G), healthcare, cars, the internet of things, and much more.
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